Meridionale Impianti

Automation and Robotics Solutions

Meridionale Impianti > HI-Tech > Automation and Robotics Solutions

MI Robotics & Automation merges advanced engineering with industrial automation expertise to deliver state-of-the-art robotic solutions. Founded in 2017, the company is composed of an interdisciplinary team of mechanical engineers and industrial automation specialists with experience in CNC machining, electrical and mechanical assemblies, and custom solutions for the semiconductor industry.

Expertise in the Semiconductor Sector

  • Front-End: We support critical operations like lithography, etching, and thin-film deposition, enhancing productivity and ensuring high product quality.

  • Back-End: We automate assembly, testing, and packaging, reducing human error and accelerating production times with precision-engineered solutions.

Robotics & Automation systems portfolio

We offer a wide range of industrial automation solutions designed to improve efficiency and integration in production processes:

Automatic Stockers

Intelligent storage systems for wafer boxes, reticles, and carriers, with modular designs for seamless integration.

Automated Transport Systems

Efficiently connecting production lines with advanced sensors and safety protocols.

Automatic Load/Unload Systems

Enhancing precision and reducing manual intervention in material handling.

Mobile Robots

Autonomous systems equipped with LiDAR technology for dynamic navigation and safe human interaction.

We develop solutions that comply with SEMI E82 and E84 standards, ideal for cleanrooms, automated logistics, and production flow optimization.

Automatic Stocker Systems

Reticle Stocker

The Reticle Stocker is an advanced automated storage system designed to manage large-scale operations with unparalleled precision and efficiency. With a length of up to 12 meters and a height of 3 meters, it offers a remarkable storage capacity of up to 3,900 units. At the core of its functionality are Cartesian robots with interpolated axes, engineered to pick and place reticle boxes from fixed shelving. These robots navigate efficiently through the aisles between the static shelves, ensuring optimal space utilization and effective material management.

  • Maximum speed: 5 m/s

  • Maximum acceleration: 50 m/s²

  • Repeatability accuracy: 0.05 mm

  • Static load limits: 4,410 N in the Fx direction, and 79,000 N in both Fy and Fz directions.
  • Static moment limits: 1,300 Nm in the Mx direction, and 7,110 Nm in both My and Mz directions.

This system is more than just a storage solution; it is a testament to excellence in automation and engineering. By combining speed, precision, and robust performance, the Reticle Stocker integrates seamlessly into industrial workflows, enhancing productivity and optimizing storage processes.

Wafer Stocker

The Wafer Stocker is designed to facilitate the robot's fluid movement along a linear axis perpendicular to the pick-up and delivery points. This design enables a wide range of motion, allowing the robot to efficiently access every storage and retrieval point within the robotic island. At the heart of the system is a 6-axis robot with six degrees of freedom (6 DOF), providing precise and flexible wafer handling capabilities. This advanced robotic integration ensures exceptional accuracy and adaptability, meeting the complex demands of wafer management.

  • Entry and exit port for production batches, operable in both automatic and manual modes.
  • Automated sliding door, controlled by the system’s operational logic and a dedicated safety mechanism.

This dual-control configuration ensures maximum safety during operations, providing peace of mind in high-criticality environments.

Tray Stocker (Back-end process)​

The Tray Stocker is a flexible storage system designed to hold up to 100 containers, offering advanced functionalities for simplified management and maintenance. A dedicated maintenance access door ensures easy upkeep, while an intuitive HMI panel provides centralized, user-friendly control of all operations.

  • HMI Panel: An intuitive human-machine interface that allows operators to monitor and manage all system operations in real time, including container status, load/unload operations, and system alarms.
  • Internal Handling System: Uses high-precision Cartesian robots to move trays to and from storage positions. The system can be configured to accept different container formats, making it adaptable to a variety of production needs.
  • Traceability and Control: Each container is identified via RFID or barcodes, allowing for complete traceability throughout the entire production chain.
  • FIFO/LIFO Function: The management software can be programmed to operate in either FIFO (First In First Out) or LIFO (Last In Last Out) mode, based on the requirements of the production process.
  • Safety hatches with integrated sensors prevent access to operational areas during automatic movement phases.
  • Standard interfaces (SEMI E84, OPC-UA, etc.) for easy integration with MES, WMS, and other factory supervision and control systems.

Automated Transport Systems

Automated transport systems are the invisible yet essential infrastructure that provides a continuous and fast connection between different operational areas within an industrial facility. These systems ensure the timely and traceable movement of production batches and materials, optimizing internal logistics in both single-facility and multi-building environments.

Key Advantages:

  • Seamless integration between the different phases of the production process.
  • Advanced navigation and control technologies for optimal route management.
  • Reduced downtime, greater operational efficiency, and increased internal safety by eliminating hazardous manual movements.
  • Real-time monitoring and traceability of materials in transit, for more agile production that is reactive to changes in demand.

Monorail Transport System

The Monorail transport system is designed to automate the transfer of wafers between buildings within the same FAB, where different production processes are underway. It is the ideal solution for the safe, fast, and precise movement of high-value materials in critical environments.

  • Designed to operate in outdoor environments with exposure to wind, snow, seismic events, and thermal fluctuations, thanks to a rigid structure compliant with NTC 2008 regulations.
  • Simplified accessibility: inspection hatches and dedicated access points allow for maintenance without interrupting operations.
  • Each shuttle is equipped with a low-voltage axial motor and obstacle detection systems to ensure smooth, collision-free operation.
  • Material transport capacity of up to 15 kg per shuttle, with cruising speeds up to 40 m/min.
  • Straight sections, 45° and 90° curves, lane switches, and dual-lane layouts.
  • Ability to create closed loops and highly customized layouts, depending on the FAB’s arrangement.

Transport System – Overhead or Floor Installation

A versatile transport system, available in overhead or floor-based versions, designed to integrate with Cartesian robots and with automatic load/unload and material distribution systems.

  • Integrated motors with drives, controllers, and signaling devices for fully automated operations.
  • Load capacity: up to 2.5 kg per disc or 10 kg in a tandem configuration.
  • Speed up to 2 m/s, with accelerations up to 4 m/s², which can be modulated based on the load and cart type.
  • Positioning repeatability: ±0.5 mm (in-line motors) and ±0.10 mm at calibrated stations.
  • Integrated traceability without RFID, with the option for optional integration.
  • Compliant with CE regulations and UL certified for quality and safety.

Automatic Load/Unload Systems for Process Tools

Automatic load/unload systems are a fundamental link between materials and process equipment. They integrate handling functions, temporary storage, and precise transfer, maximizing productivity and reducing human error.

Main Applications

  • Stepper Tool (Photolithography): Seamless integration of production batches into stepper systems with maximum precision.
  • Scrubber Tool Process: Efficient movement of wafers for cleaning and contaminant removal processes.
  • Cleaning Tool Process:
    • 8 temporary storage stations for E99 cassettes.
    • 6 load ports for quick transfers.
    • 16 TEFLON/PIC stations for safe wafer handling.
    • Single wafer mapping and stations for multi-wafer exchange.

Lithography Area Robotization (Metro Litho)

  • Six-axis anthropomorphic robot for high-precision movement.
  • 4 buffer stations with automatic box opening.
  • Repositionable robotic island for maintenance without process interruption.

Reticle Management

  • System with a Cobot and linear guide: precise movement between the overhead transport system and the process tool.
  • Detachable linear guide for flexible adaptation to different configurations.

Burn-In Boards (BIB) System

  • Full automation of the flow between sorters, ovens, and test systems.
  • Centralized hardware/software integration.
  • Reduction of downtime and manual activities.

Autonomous Mobile Robots (AMRs)

Autonomous Mobile Robots (AMRs) offer an intelligent solution for internal transport in complex industrial environments. Based on advanced perception and navigation technologies, they ensure a continuous, safe, and fully automated flow of materials.

Key Technologies:

  • Navigation via LiDAR, environmental mapping, and autonomous path planning.
  • Safe interaction with people and obstacles, thanks to real-time detection and avoidance algorithms.
  • Direct integration with WMS, MES, and other management systems.

MOMA Range – Available Versions

  • S.A.R.A. E99: Optimized for precise handling of E99 cassettes.
  • S.A.R.A. SMIF: Designed for cleanroom environments with a SMIF interface.
  • S.A.R.A. FOUP: For FOUP transport in highly automated semiconductor environments.
  • S.A.R.A. CARRIERS: Flexible for transporting various carrier formats.
  • S.A.R.A. CARRIERS LD90: A low-deck version for environments with height constraints.