Meridionale Impianti

Gas Systems

Gas systems are indispensable in various industrial environments, such as semiconductor manufacturing, photovoltaics, chemical and pharmaceutical industries, and laboratories, where maintaining and controlling gas purity and ensuring the safety of the environment and personnel is paramount. These systems are assembled in sterile environments (clean rooms) so as to avoid contamination of the UHP (Ultra High Purity) components used while maintaining very low residual impurity contents.

GAS CABINETS: MaGiC Series

Gas is generally distributed from cylinders by pressure decompression using a containment cabinet and a distribution, regulation and control panel. GAS CABINETS are designed to meet the most stringent safety standards, and are equipped with various devices to ensure the overall integrity of the system. MI produces GAS CABINETS with different degrees of automation (PLC/Touch Screen) for all required use profiles (inert, corrosive, toxic, flammable, pyrophoric gases), also designed to customer specifications or in ‘Standard’ version. Our GAS CABINETS are also available as stand-alone solutions and are characterised by a high degree of flexibility in the various application areas, with solutions that guarantee ease of operation, maintenance and minimum space requirements.

gas-cabinet-so2
  • Compatible with all types of gases (compressed and non-compressed) and cylinder types
  • SS AISI 316 L EP components and fittings
  • VCR connections
  • Automatic switch between two sections for continuity of operation
  • Automatic purge during cylinder changes
  • PLC with colour touch screen
  • Real-time dynamic information via HMI interface
  • Distribution manifold with number of outlets according to customer requirements
  • Exhaust flow alarm
  • Emergency gas shutdown
  • Overflow switch
  • Firefighting
  • Gas detection system
  • Gas cabinet access with different user levels and passwords
  • Integrated purge gas panel
  • UHP filters
  • Purifiers
  • Flow meter on POUs

GAS PANELS

GAS PANELS are another essential element for gas distribution are generally used for inert or non-hazardous gases. Their main characteristic is the absence of gas cylinder cabinets, but they maintain all the characteristics of purity, manoeuvrability, maintenance and safety. The gas panel is equipped with all devices for gas decompression, regulation and control. GAS PANELS can be manufactured according to customer specifications or to our own standards. Thanks to our in-house engineering and design capabilities, we help our customers determine the type of GAS PANEL best suited to the required performance.

gas-panel
  • Automatic switch between two sections for continuity of operation
  • Automatic purge during cylinder changes
  • SS AISI 316 L EP components and fittings
  • VCR connections
  • PLC with colour touch screen
  • Emergency gas shoutdown
  • Excess Flow Switch
  • UHP Filters
  • Purifiers
  • Flow meters on POUs

VMB/VMP (Valve Manifold Box/Valve Manifold Panel)

The VMB/VMP (Valve Manifold Box/Valve Manifold Panel) is a component that plays a key role in the distribution of gases to the various users. These systems facilitate distribution to the point-of-use (POU), ensuring the correct pressure and gas quantities are delivered. The number of POUs and its configuration can be chosen by the customer according to his needs. Our systems can be fully automatic (VMB ) with PLC and touch screen or manual VMP. It is possible to have different solutions including a semi-automatic solution with ESO (Emergency Shut Off) functionality.

vmb-sih4
  • Compatible with all types of gases (compressed and non-compressed) and cylinder types
  • SS AISI 316 L EP components and fittings
  • VCR connections
  • Automatic purge of the entire system or individual POU
  • PLC with colour touch screen
  • Real-time dynamic information via HMI interface
  • Distribution manifold with number of outlets according to customer requirements
  • Exhaust flow alarm
  • Emergency gas shoutdown
  • Excess Flow Switch
  • Firefighting
  • Gas detection system
  • UHP Filters
  • Purifiers
  • Flow meters on POUs

GAS MIXERS

Gas mixers are an integral part of ultra-pure gas distribution systems, especially in applications requiring gas mixtures with a high degree of precision. The system allows different gases to be combined together in defined proportions, thus enabling customised gas mixtures for specific processes. Accuracy can be controlled by an analyser supplied with the system. The reliability and precision of the mixers is guaranteed by the control system and the concentration value of the mixture can be continuously monitored by the inline analyser.

gas-mixer-cnr
  • Capacity: 50 -100 slpm
  • Flow rate: 0 – 50 slpm, 0-100 slpm
  • Maximum inlet gas pressure: 6 – 10 bar
  • Outlet pressure: 0 – 100 psi
  • Accuracy: +/- 0.1%

Analyzer

  • Linearity: <= 1%
  • Resolution: <= 1%

Mass flow controller

  • Accuracy: +/- 1% full scale
  • Linearity: +/- 0.5% full scale
  • Repeatability: +/- 0.2%

BULK GAS

For the distribution of large quantities of gas, the need arises to use larger-volume containers (bulk) in order to avoid constant changes of storage containers. In this case, there are several solutions compared to traditional cylinders such as cylinder packs, drums, cylinder wagons or tanks.

We can provide you with solutions for high flow distribution systems that always guarantee purity, reliability and safety. Again, different solutions are available: automatic (PLC/Touch Screen), semi-automatic (differential pressure) or fully manual exchange configurations.

Bulk Gas

Solutions

  • Bomb Packs:
    • 12 cylinders
    • 16 cylinders
  • Drums
  • Tank wagons
  • Tanks

Gases in bulk examples:

  • N20
  • NF3
  • SiH4
  • CH4
  • NH3
  • HCL
  • CL2
  • CF4
  • C3F6
  • SiCl4
  • SiCl3
  • CO2
  • H2
  • N2
  • Ar
  • He
  • O2
  • Exhaust flow switches connected to PLC
  • Speech synthesis capability for verbal
  • Provisione for Gas Detection sensors
  • Excess flow switches connected to PLC
  • UV/IR sensors on flammable and pyroforic
  • Customised paging and full SPC functionality
  • EMO button easily accessible
  • Sprinklers on all GC’s
  • Barcode identification system for gas cylinders

Contact us for more information about our pure and ultrapure gas distribution systems. Our experts are at your disposal to guide you in choosing the most suitable solution.

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